Abstract
The linearity of intrinsically switchable thin film bulk acoustic wave resonator (FBAR) filters based on ferroelectric barium strontium titanate (BST) is investigated. A 2.5 stage ladder type BST FBAR filter is designed and fabricated with an insertion loss of 4.3 dB and a fractional bandwidth of 2.5% at the center frequency of 2.2 GHz. Third-order intercept point $(\mathbf{IP}_{\mathbf{3}})$ measurements are conducted to characterize the linearity of the filter. The measured $\mathbf{IIP}_{3}$ value for the filter is 47 dBm.
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