Abstract
Heterodyne laser interferometry and its accuracy at subnanometer levels are discussed. The simplest optical nonpolarization heterodyne interferometer is tested experimentally to understand and reduce fringe distortion. An accuracy of 0.1 nm for the 633-nm He-Ne laser interferometer is achieved.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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