Linear high-Tc YBa2Cu3O7-δ superconducting thin film infrared detectors coupled with a cylindrical microlens array in quartz glass substrate

Abstract

Monolithic linear cylindrical microlens array in a quartz glass substrate is fabricated using photolithography and ion beam etching technique, the high-Tc YBa2Cu3O7−δ superconducting thin films are deposited through excimer laser scanning ablation, the superconducting thin films are patterned by photolithographic method and ion beam etching technique, and the hybrid structure of the microlens array component and the superconducting IR detectors has been obtained using an IR glue to cement the microlens component onto the superconducting device. We also investigate the optical response characteristics of the hybrid device in the optical spectral region of 1 ~ 5 μm, as follows. The average optical responsivity \((\overline R )\) of the hybrid device is 1.6×104 V/W, average noise equivalent power \((\overline {NEP} \;)\) is 2.3×10−12 WHz−1/2, average detectvity \((\overline {D^ * } )\) is 3.2×109 cmHz1/2W−1, and the non-uniformity of detectvity (D*) is not more than 14%. The experimental results show that the performance of the superconducting device is improved notably using a quartz glass refractive microlens array as the incident IR radiation concentrators.