Abstract
This paper shows how measurement errors in phase shifting interferometry (PSI) can be described to a high degree of accuracy in a linear approximation. System error sources considered here are light source instability, imperfect reference phase shifting, mechanical vibrations, nonlinearity of the detector, and quantization of the detector signal. The measurement inaccuracies resulting from these errors are calculated in linear approximation for several formulas commonly used for PSI. The results are presented in tables for easy calculation of the measurement error magnitudes for known system errors. In addition, this paper discusses the measurement error reduction which can be achieved by choosing an appropriate phase calculation formula.
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