Linear and non-linear vibration and frequency response analyses of microcantilevers subjected to tip–sample interaction

Abstract

Despite their simple structure and design, microcantilevers are receiving increased attention due to their unique sensing and actuation features in many MEMS and NEMS. Along this line, a non-linear distributed-parameters modeling of a microcantilever beam under the influence of a nanoparticle sample is studied in this paper. A long-range Van der Waals force model is utilized to describe the microcantilever–particle interaction along with an inextensibility condition for the microcantilever in order to derive the equations of motion in terms of only one generalized coordinate. Both of these considerations impose strong nonlinearities on the resultant integro-partial equations of motion. In order to provide an understanding of non-linear characteristics of combined microcantilever–particle system, a geometrical function is wisely chosen in such a way that natural frequency of the linear model exactly equates with that of non-linear model. It is shown that both approaches are reasonably comparable for the system considered here. Linear and non-linear equations of motion are then investigated extensively in both frequency and time domains. The simulation results demonstrate that the particle attraction region can be obtained through studying natural frequency of the system consisting of microcantilever and particle. The frequency analysis also proves that the influence of nonlinearities is amplified inside the particle attraction region through bending or shifting the frequency response curves. This is accompanied by sudden changes in the vibration amplitude estimated very closely by the non-linear model, while it cannot be predicted by the best linear model at all.