Linear and non-linear optical properties of boron carbide thin films

Abstract

Boron carbide films deposited by PECVD are subjected to post deposition vacuum annealing and plasma treatment for investigation of changes in the structure, linear and non-linear optical properties of the films. Deconvolution of core level XPES spectra of B1s, C1s and O1s indicates changes in the surface chemical states of the constituent atoms after post deposition treatments. Particle size estimated from XRD spectrum is found increasing from 135 to 140 nm after annealing. Envelop method is used to estimate refractive index, extinction co-efficient, and thickness from their measured optical transmission spectra in VIS-NIR region (400–1400 nm). The refractive index value is found to be 1.619, highest for the vacuum annealed boron carbide film. Direct and indirect optical bandgap remains same after vacuum annealing (Eg = 2.84), the plasma treatment causes a slight decrease in the bandgap. 5% decrease in film thickness is observed after post deposition annealing and plasma treatment owing to film densification. Energy loss in the medium measured in terms of tanδ and ELF’s reveals that the vacuum annealing of the film reduces the electromagnetic and electron energy loss in the film. Non-linear refractive index estimated using Ticha and Tichy relation exhibits similar trend as the linear refractive index spectra.