Linear 2D Beam Steering With a Large Focusing Grating via Focal Point Movement and Wavelength

Abstract

We demonstrate a 2D beam-steering device in SiN based on a large focusing grating, achieving a steering range of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$3.2^\circ \times 46^\circ $ </tex-math></inline-formula> , with discrete steps in azimuth. Despite the curved geometry, it achieves linear raster scanning. It employs only a single SiN layer and a low-resolution full etch.