Abstract
A technique for incorporating a groove into a LiNbO(3) substrate is described. Both V grooves for fiber alignment and vertical grooves for waveguide end-face formation can be fabricated with this technique. The proposed fabrication method is based on an excimer-laser ablation and a high-speed rotation saw cut for LiNbO(3) . The former process provides a variety of cross-sectional groove shapes by changing the ablation mask shape of LiNbO(3) , and the latter provides an optical-quality cutting face. The proposed fabrication method is simple and provides low-cost optical platforms not only for LiNbO(3) but also for glasses, polymers, and semiconductors.
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