Abstract
SUMMARYThe performance of many electron optical instruments is fundamentally limited by the dimensions of the focused probe. This is true of the scanning electron microscope and the scanning transmission electron microscope and, by inference, it may affect the transmission electron microscope. There has been very little improvement over the past few years and it seems reasonable to look for the explanation. It is possible to arrive at some simple expressions for the limiting performances of conventional instruments in a way that is independent of the design details and depends upon practical limits of field strength. Experiment and theory also appear to be in agreement with the fact that the limit for high‐voltage instruments has been reached, although there is still room for improvement for low voltages.
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