Abstract
Single crystals of nickel with an inserted thin layer of 63Ni tracer atoms were sputter sectioned in a secondary ion mass spectrometer. By varying the energy and the current density of the sputter ions as well as the temperature during sectioning, the resolution function for sputter sectioning of nickel was quantitatively investigated. The resolution function is an asymmetrical peak. Its width is produced by two effects, atomic mixing and sputter roughening, while the asymmetry, which is described by an exponential slope, is determined by the mixing effect alone. The results will be discussed within a diffusion model of depth resolution.
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