Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis

Abstract

The depth resolution of heavy-ion elastic recoil detection analysis (HIERDA) was examinedfor Al and Co thin films ranging in thickness from 100 to 400 nm. Measurements were performed with 154 MeV Au ions as the incident beam, and recoils were detected using a gas ionisation detector. Energy spectra were extracted for the Al and Co recoils and the depth resolution determined as a function of film thickness from the width of the high- and low-energy edges. These results were compared with theoretical estimates calculated using the computer program DEPTH.