Abstract
Multimode Nd:YAG pulse laser was applied to remove micron and submicron particles by vaporizing a thin paint film pre-coated on super-smooth optical substrate surface. By analyzing the poor absorption of the optical glass substrate to the irradiative Nd:YAG pulse laser, the removal mechanism of contaminated colloidal particles from the super-smooth surface through vaporization of a volatile solid film is described. A limit analysis was proposed to determine the lower and the upper threshold of laser fluence for cleaning the SiO 2 contaminants from super-smooth K8 optical substrate. Relevant experiments on laser cleaning of micron-polishing particles from super-smooth K8 optical substrate confirmed the usefulness of this method in assisting the selection of effective cleaning fluence for accomplishing high cleanliness, which was in a range of 80–90% of the predicted upper threshold.
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