Abstract
<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> High-performance antennas at lightwave frequency require optimal curved surfaces and high mechanical precision in order to realize high aperture efficiencies. We have developed a novel micro lightwave antenna by employing the micro electromechanical system processing technology. We describe a transparent antenna that has a multilevel step structure with a diameter of 4 millimeters. The ideal curve of the antenna surface is discretized by steps of constant height. The characteristics of the fabricated antenna have been measured; its gain is 84.1 dBi, which is 0.83 dB less than that of a reference antenna with a uniform field distribution. The aperture efficiency is 82.6%. The power radiation pattern is measured through the Fourier transform lens method and is in good agreement with the simulation result. </para>
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