Abstract
Our work is aimed at the method of fabricating arrays of semiconductor III-V NWs transferred into a flexible polymer membrane made of polydimethylsiloxane. GaP/GaPAs NWs with an axial p-i-n structure were synthesized by molecular beam epitaxy. The synthesized NW arrays on substrates were encapsulated into a silicone membrane by the G-coating method in a swinging-bucket centrifuge. After membranes were treated in a plasma mixture of O2/CF2 gases to open the NWs tops, which ensured the application of conductive transparent contacts - single-walled carbon nanotubes obtained by aerosol chemical method. At the last technological stage, the membranes were separated from substrates by peeling with a razor blade and the second carbon nanotubes contact was formed. The obtained LED NW/silicone membranes were characterized by I-V and the electroluminescence spectroscopy measurements.
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