Abstract
We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.
Highlights
Photolithography is a key pattern-transfer process that is used in fabrication of microelectronicchips, microopticchips e.g. laser diodes and light emitting diode (LED) etc
We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms
The results of the spectral power distribution (SPD) measurements and the calculation of the colorimetric properties for the LED bulb and the YFT are presented in the following
Summary
Photolithography is a key pattern-transfer process that is used in fabrication of microelectronicchips, microopticchips e.g. laser diodes and LED etc It consists of three main steps: Photoresist spin, exposure and developing. When working with photoresist it is extremely important that it is not exposed to light containing wavelengths in the sensitive range of the photoresist, before the appropriate exposure moment in the fabrication process. This put limitations on the light sources used for ambient illumination in photolithography rooms. The current solution to this problem is to use yellow fluorescent light tubes (YFT), which filters out all light components with wavelengths below 500 nm This light source appears yellow, photolithography rooms are often called yellow rooms. People that have been working in a yellow room for several hours, may have issues readjusting to normal illumination when departing
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