Abstract
The outward mass transport during implantation of 60 keV negative Cu, Ag and Au ions into LiNbO 3 and Al 2O 3 was studied by using in situ time-resolved optical spectroscopy. Single crystals of LiNbO 3 and Al 2O 3 were irradiated continuously or by pulses of ions. Spectra of ion-induced light emission at the wavelengths from 250 to 900 nm were in situ measured. The ratios of individual lines of the same atomic species (Li for LiNbO 3 and Al for Al 2O 3) change with the dose. The change of energy distribution of sputtered atoms is explained by a competition between two mechanisms of sputtering: the sputtering induced by atomic collisions or electronic excitation. The result shows a strong relationship between irreversible structural change of implanted regions (formation of nanocomposite and damage) and energy distribution of sputtered atoms.
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