Abstract

Abstract Selective metal deposition controlled by light irradiation was achieved for Zn, Mg, and Mn on a photochromic diarylethene (DAE) film; metal vapor atoms were deposited only on the colored film but not on the uncolored film. The deposition properties of the metals were strongly dependent on the deposition rates. Fine metal patterns were produced by laser scanning and a conventional vacuum-evaporation method without a shadow mask. Multiple-metal pattern preparation of Zn, Mg, and Mn via a maskless evaporation in a single vacuum process was also demonstrated.

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