Abstract

In support of establishing production capability of Lithographie Galvanoformung Abformung (LiGA) technology at the Honeywell Federal Manufacturing and Technologies (FM&T), also known as the Department of Energy (DOE) Kansas City Plant (KCP), measurement and acceptance techniques were evaluated on micro-miniature mechanical prototype components. Four nickel (Ni) prototype components, which were fabricated, required ±10 μm dimensional tolerance, 10 μm contours, and had to meet specific metallurgical requirements. These requirements pushed the KCP measurement and acceptances processes to their limit. The measurement techniques used to support the prototype work and the new technologies being considered from lessons learned to support future LiGA activities are described. This work was completed jointly with Sandia National Laboratories and supports future production needs for the Department of Energy.

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