Abstract
This paper describes activities and development of the LIGA technology in Taiwan. The third-generation synchrotron at SRRC, providing the radiation covering an energy range from VUV to soft X-ray, is fully optimized for the wide-range applications in science and technology. In its five-year plan started from 1995, SRRC has identified deep X-ray lithography and related LIGA technology as one of the main focuses of the applied research programs. To integrate a multiple discipline research, SRRC also seeks collaboration with the following organizations in Taiwan: Industrial Technology Research Institute, National Nano Device Laboratory, Chung-Shan Institute of Science and Technology, Universities and Textile Industry. In the near future, LIGA technology will be used to fabricate the microstructures for the scientific and industrial applications, such as zone plate, nozzle, sensor and heat transfer layer for VLSI.
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