Abstract

Microchannel plates have been made by combining glass capillary substrates with thin films. The films impart the resistance and secondary electron emission (SEE) properties of the MCP. This approach permits separate choices for the type of glass, the MCP resistance and the SEE material. For example, the glass may be chosen to provide mechanical strength, a high open area ratio, or a low potassium-40 concentration to minimize dark rates. The resistive film composition may be tuned to provide the desired resistance, depending on the power budget and anticipated count rate. Finally, the SEE material may be chosen by balancing requirements for gain, long term stability of gain with extracted charge, and tolerance to air exposure. Microchannel plates have been fabricated by Incom Inc., in collaboration with Argonne National Laboratory and UC Berkeley. Glass substrates with microchannel diameters of 10 and 20 microns have been used, typically with a length to diameter ratio of 60:1. Thin films for resistance and SEE are applied using Atomic Layer Deposition (ALD). The ALD technique provides a film with uniform thickness throughout the high aspect ratio microchannels. MCPs have been made in sizes up to 8”x8”. This three-component method for manufacturing MCPs also makes non-planar, curved MCPs possible. Life testing results will be presented for 10 and 20 micron, 60:1 l/d ratio MCPs, with an aluminum oxide SEE film and two types of glass substrates. Results will include measurements of resistance, dark count rates, gain, and pulse height distributions as a function of extracted charge.

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