Abstract
The energy and density distribution of Ar ions in the plasma of a cylindrical magnetron discharge was investigated by laser induced fluorescence (LIF). It was found that the density of the ions has a broad maximum extending into the negative glow and positive column. The density decrease is much faster towards the cathode than in the opposite direction, consistent with recently published results obtained by Langmuir probe measurements and numerical simulations. The spatial distribution of the “effective ion temperature” estimated from the line profile has a shape similar to that of the ion density distribution, with maximal value also inside the region of the negative glow but closer to the athode surface. The peak value is in the eV range for measurements perpendicular to the electric field and somewhat above 10 eV in the direction of the field.
Published Version
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