Abstract
The rapid thermal annealing (RTA) process was employed to obtain crystalline LiCoO 2 thin films. XRD analyses of the LiCoO 2 thin film show increased crystallinity with an increase in the RTA time. The Auger electron spectroscopic analysis of the LiCoO 2 film strongly suggests that the RTA process is more advantageous to obtain a stable inter layer between the substrate and the deposited film and between each deposited layer than the conventional annealing process. All-solid-state thin film cells composed of Li/lithium phosphorous oxynitride (Lipon)/LiCoO 2 systems were fabricated using the LiCoO 2 cathode treated with RTA. The optimum condition of RTA would be 900 s at 650 °C, which exhibited a good rate capability for high power applications. Two cells were connected in parallel to obtain a higher discharge current, and they showed a specific capacity of 38.4 μAh cm −2 μm −1 even at a 25 C rate (current density: 7.96 mA cm −2).
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