LIBS repeatability study based on the pulsed laser ablation volume measuring by the extended depth of field microscopic three-dimensional reconstruction imaging

Abstract

To efficiently monitor the laser ablation volume, the extended depth of field imaging microscope three-dimensional measurement technology and Laser-Induced Breakdown Spectroscopy (LIBS) technology are combined into one system. By means of the sequence images acquisition, images matching, filtering, focusing evaluation, multi-image fusion and 3D reconstruction, a measurement can be realized shortly after the laser ablation and LIBS signal acquisition, and some primacy experiments show that this method has enough performance to discriminate the volume of laser ablation craters. The combined system was used to evaluate LIBS signals and ablative crater volumes, and it was shown that there is a positive correlation between the volume of laser ablation craters and LIBS line intensity, and the repeatability of LIBS signal can be improved by correcting LIBS signal with ablation volume.