Abstract

Rutherford backscattering (RBS) measurements of 4.2 MeV Li and 2.4 MeV He ions were done for YBaCuO and GdBaCuO high-Tc superconductor films deposited on MgO and SrTiO3 single crystalline substrates and for their bulk samples. Energy spectra of both ions were calculated using the RBS analysis program rewritten by the authors. Comparisons between these two non-destructive techniques showed some advantages in analyzing the layer thickness and composition ratios of those thin films by MeV Li ions backscattering. Estimated errors are within 7% for the measured elemental concentrations and 10% for the layer thickness in our experiments. A brief discussion is also made of the results.

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