Abstract

Predictive Maintenance (PdM) systems use process and equipment state information to predict when a tool or a particular component in a tool might need maintenance. PdM systems can be realized cost-effectively by leveraging Advanced Process Control (APC) technologies and infrastructure. APC data collection infrastructure can provide the state information necessary for prediction. APC fault detection systems contain necessary algorithms to identify features important to prediction, including tool health. In leveraging APC systems in a reusable and reconfigurable way, cost-effective PdM systems can be realized as part of existing fab infrastructure, leading to lower unscheduled downtimes, reduced mean-time-to-repair, reduced scrap, and increased life of components and consumables.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.