Abstract
Predictive Maintenance (PdM) systems use process and equipment state information to predict when a tool or a particular component in a tool might need maintenance. PdM systems can be realized cost-effectively by leveraging Advanced Process Control (APC) technologies and infrastructure. APC data collection infrastructure can provide the state information necessary for prediction. APC fault detection systems contain necessary algorithms to identify features important to prediction, including tool health. In leveraging APC systems in a reusable and reconfigurable way, cost-effective PdM systems can be realized as part of existing fab infrastructure, leading to lower unscheduled downtimes, reduced mean-time-to-repair, reduced scrap, and increased life of components and consumables.
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