Level set methods for the modelling of surface evolution in the abrasive jet micromachining of features used in MEMS and microfluidic devices

Abstract

The time-dependent evolution of an abrasive jet micro-machined surface is described by a partial differential equation which is difficult to solve using traditional analytical or numerical techniques. As a result, traditional surface advancement models can give incorrect predicted profile depths. In this work, level set methods were used to develop novel models of the abrasive jet machined surface evolution of unmasked and masked channels and holes in glass and polymethylmethacrylate. The level set-predicted eroded profiles were compared to those experimentally obtained, as well as to those predicted by existing analytical and computer models. For the majority of cases, the level set-predicted surface advancement was closer to the measured profiles than those predicted by existing analytical and computer models. The work demonstrates the potential of the level set methodology as a generally applicable tool for the prediction of abrasive jet machined surface profiles, and provides a foundation for future simulation of more complex abrasive jet micro-machining operations.