Lens coating in thermal evaporation physical vapour deposition chambers: optimization of the geometrical configuration

Abstract

Following established procedures to enhance layer thickness uniformity in the multiple substrate coating inside a thermal evaporation physical vapour deposition unit, the present study completes the analysis and extends the optimization to include all the relevant geometrical factors influencing the coating of concave or convex spherical surfaces held by a spherical (dome-shaped) calotte. The computer-aided method proposed is very useful for the improvement of layer thickness uniformity (i) all across a single lens surface, (ii) between both lens faces, and (iii) between coatings deposited on lenses placed at different positions on the calotte.