Abstract

The Leidenforst motion of diluted water micro-droplets on hot flat substrates enables the growth of α-Ga2O3 thin films via mist chemical vapor deposition. The incident probability, incident angle, lifetime, and gliding distance of the microdroplets at surface vicinity determine the growth behaviors of the epilayer. More details can be found in article number 2001895 by Minh-Tan Ha, Si-Young Bae and co-authors.

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