Abstract
Steps on single crystal surfaces have been shown to cause changes of various physical properties and to influence the behaviour towards chemical reactions. A proper knowledge of the step structure is required for the understanding of these phenomena. The following investigation concentrates on a detailed evaluation of the LEED patterns of various stepped tungsten surfaces. A formula is given for determining the terrace width of ordered step arrays from any diffraction order. Step height, step orientation, terrace width and the sample orientation have been deduced from the LEED patterns and the experimental errors involved are being discussed. The step height can be determined within 1% and the terrace width within 1 to 3% depending on the step density. It is concluded that the determination of the sample orientation as obtained from the LEED pattern is at least as precise as by using the Laue X-ray back reflection technique.
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