Abstract
The LEED electron optics can be used as an electrostatic mirror microscope with resolution better than 5 μ and magnification over 1000×. Defects in silicon picture tube-diode arrays and scratches on sapphire substrates at which deposited aluminum had preferentially nucleated have been successfully imaged using LEED optics with no modifications. This method can be used to investigate surface topography and electric and magnetic field variations.
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