Abstract

In order to improve the light emitting efficiency of GaN-based LED,a double-grating structure was established by etching grating on both sides of silver metal film. A numerical simulation was conducted using the finite difference time domain method( FDTD). The light extraction efficiency in different patterns was compared,including without-silver-film pattern,without-grating pattern,single-grating pattern and double-grating pattern. When the grating period is 300 nm,duty cycle is 0. 23,silver film thickness is 30 nm and light source depth is 150 nm,the light extraction efficiency of the double-grating structure is improved by 6 times than the single-grating structure, and 16 times than the structure without grating.

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