Abstract
This paper describes the design, fabrication, and experimental characterization of photonic crystal microbeam cavity resonators for the terahertz band implemented using suspended dielectric rectangular waveguide (DRW) in high-resistivity silicon. Electrical quality factors of up to 11 900, combined with small modal volumes of 0.28 and 0.077 mm3, are demonstrated for devices operating at 100 and 200 GHz, respectively. The devices are found to be extremely light-sensitive, opening up new opportunities for light-controlled switching devices at terahertz frequencies. It is shown that the quality factor of the resonator can be tuned and the resonance extinguished through photo-illumination with an infrared light-emitting diode (IR LED). Additionally, the questions of thermal tunability and thermal stability of the resonators are examined. The demonstrated resonators are inherently suited to integration with DRW and, by silicon bulk micromachining, represent an attractive approach for realizing microphotonic-integrated circuits for terahertz systems-on-a-substrate.
Highlights
H IGH quality (Q-) factor resonators form the basis of millimeter and submillimeter wave system components, such as low phase-noise oscillators, impedance matching networks, and narrowband filters [1]
This paper describes the design, fabrication, and experimental characterization of photonic crystal microbeam cavity resonators for the terahertz band implemented using suspended dielectric rectangular waveguide (DRW) in high-resistivity silicon
It is shown that the quality factor of the resonator can be tuned and the resonance extinguished through photo-illumination with an infrared light-emitting diode (IR LED)
Summary
H IGH quality (Q-) factor resonators form the basis of millimeter and submillimeter wave system components, such as low phase-noise oscillators, impedance matching networks, and narrowband filters [1]. By careful tuning of hole radii and positions, it is possible to create a localized state within the waveguide bandgap that supports a high Q-factor resonance, which can be coupled to by the fundamental TE or TM DRW mode [7]. We describe the use of suspended HRS DRW to form microbeam PCRs (MPCRs) and demonstrate the suitability of the technology for the millimeter-wave and terahertz bands by fabricating two MPCRs operating at 100 and 200 GHz. we show how these devices can be conveniently coupled to metal-pipe rectangular waveguide and packaged.
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