LEAKAGE CURRENT CHARACTERISTICS OF Pt/Ba0.6Sr0.4TiO3/Pt THIN-FILM CAPACITORS

Abstract

ABSTRACT Leakage current characteristics of Pt/Ba0.6Sr0.4TiO3/Pt ferroelectric thin-film capacitors were investigated at the temperature range from 273 K to 393 K. It is implied that there are two conduction regions in the capacitors, i.e. ohmic behavior at low voltage (< 0.4 V) and Poole-Frenkel or Schottky emission mechanism at high voltage (> 1.8 V). The depletion layer widths calculated from Poole-Frenkel model and Schottky emission model are 36.9 nm∼ 61.5 nm and 6.8 nm∼ 11.5 nm, respectively. Moreover, the trapped level, the Schottky barrier height, the constant and the effective Richardson constant are 0.56 V, 0.49 V, 0.227A/cm2 · V and 1.15 × 10−7 A/cm2 · K2, respectively.