Lead zirconate titanate-based thick films for high-frequency focused ultrasound transducers prepared by electrophoretic deposition

Abstract

An electrophoretic deposition (EPD) process with high deposition rate was used to fabricate a curved piezoelectric thick film devoted to high-frequency transducers for medical imaging. Niobium-doped lead zirconate titanate (PZTNb) powder was stabilized in ethanol to prepare a suspension with high zeta potential and low conductivity. A gold layer, pad-printed and fired on a curved porous PZT substrate, was used as the working electrode for the deposition of the PZTNb thick film. This substrate was chosen because it has the required properties (acoustic impedance and attenuation) to be used directly as a backing for the high-frequency transducer, leading to a simplified process for transducer assembly with this integrated structure. PZT-Nb thick films were also deposited by EPD on flat gold-coated alumina substrates as a reference. The thickness of the films was between 20 and 35 μm, and their electromechanical performance was comparable to standard PZT bulk ceramics with a thickness coupling factor of 48%. For the curved thick film, the thickness coupling factor was slightly lower. The corresponding integrated structure was used to fabricate a transducer with a center frequency of 40 MHz and an f-number of 2.8. It was integrated into a realtime ultrasound scanner and used to image human forearm skin; the resulting images showed, for the first time, the efficacy of the EPD process for these imaging applications.