Lead Zirconate Titanate Thick Films Fabricated from Sols with and without Its Powder

Abstract

Sol modified with diethanolamine was used for the preparation of thick lead zirconate titanate (PZT) films. The deposited films crystallized in the perovskite structure by heating above 600°C. Thick film with 3 µm single-coating thickness was obtained using a dip-coating of sol containing PZT powder. The resultant thick films were porous and the pores could not be filled with a cover coating of powder-free sol. The dielectric properties of the thick and porous films prepared using powder-containing sols were poor, although they exhibited ferroelectric polarization–electric field (P–E) hysteresis. Using the powder-free sol, a film with thickness >1 µm was realized on the Sn-doped In2O3(ITO)/glass substrate by a single deposition. The resultant film was dense and about 5.6 µm thick after five depositions. The film showed a saturated ferroelectric P–E hysteresis curve and the dielectric constant, loss tangent, and remanent polarization were 840, 0.03, and 34 µC/cm2, respectively.