Abstract
A thickness vibration mode ultrasonic transducer was fabricated by hydrothermal deposition of lead zirconate titanate polycrystalline thick film. This hydrothermal polycrystalline PZT thick-film (HPTF-PZT) ultrasonic transducer was studied for its wide-frequency-band transmission characteristics. The transducer had a 50-µm-thick PZT layer on a 50-µm-thick titanium substrate in an active area of 8 mm×8 mm. The experimental results showed the HPTF-PZT ultrasonic transducer radiated a single ultrasound pulse in the frequency range from 1 to 20 MHz with a 20 dB deviation. Additionally, this transducer generated a 2 MHz sawtooth ultrasonic wave with odd-and even order-harmonic components from the 2nd to the 11th harmonics. These results indicate that the fabricated ultrasonic transducer has satisfactory wide-band characteristics for a MHz frequency range ultrasonic transmitter.
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