Abstract
This research aims at developing a method to qualitatively and quantitatively measure 10 volatile organic compounds (VOCs) by using multi-sorbents and autosampler which gathered hourly samples at the room temperature. The samples were injected to GC/MS a by thermal desorption system. Under the conditions of 80% relative humidity and 1 liter sampling volume, the result showed that the MDL was from 0.38 to 0.78ppbv and the relative recovery yield ranged from 96.2% to 98.2%.When applying this method to LCD manufactory, 11 target compounds were measured quantitatively. The average concentration of propylene glycol methyl ether acetate (PGMEA) butyl acetate and acetone were 288.7ppbv, 237.Oppbv and 75.9ppbv in respectively A manufactory. In B manufactory, acetone was measured in every manufacturing process section. The concentration of acetone was 695.7 ppbv in the photolithography process, while the concentration of propylene glycol methyl ether acetate (PGMEA) was 23.1 ppbv in photoresist zone.
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