Abstract
The stopping power and straggling of ions in channeling and blocking directions depend on multiple scattering and impact parameter dependent effects. Therefore, the extraction of high-resolution depth profiles of single crystals based on simulation of the energy spectra obtained from medium-energy ion scattering (MEIS) is not straightforward. An alternative is to analyze the MEIS angular (blocking) scattering yields from several angular configurations. We have applied this technique to obtain layer-resolved depth profiles in a dilute substitutional alloy, Fe-9 wt% W (1 0 0), and in an alloy with a small mass difference between the base metals, Fe-15 wt% Cr (1 0 0). As a result, layer-resolved depth profiling combined with conventional MEIS structural analysis allowed a detailed study of surface segregation phenomena in these systems.
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