Layered piezoelectric structures with arbitrary acoustic termination impedances.

Abstract

Multilayer piezoelectric transducers and resonators are widely used for generating propagating and standing acoustic waves as well as for sensor devices. More recently, layered piezoelectric structures based on thin film technology became increasingly important for electromechanical filters used in mobile phones. As a consequence, analytical mathematical modeling of such structures is of high interest. In this paper, a general rigorous transfer matrix description for one-dimensional (1D) layered structures consisting of piezoelectric, visco-elastic, and dielectric layers of arbitrary number is introduced to characterize the electrical and mechanical behavior of a general piezoelectric transducer or resonator with two electrodes and arbitrary acoustic termination impedances (Rig-1D-model). This model is the most general 1D analytical description of layered piezoelectric structures available and can be used for the characterization of various composite transducer and resonant sensor applications. Considered in detail are layered structures with the technically important cases of only one electromechanically coupled mode, and the structure at one or both outer surfaces is in contact with semi-infinite media. For such devices, it is shown how the frequency dependence of the total electrical admittance and spatial dependence of the displacements can be calculated.