Abstract
By introducing a thin MgO buffer, layer-by-layer growth of ZnO epilayers on Al2O3(0001) substrates is achieved by plasma-assisted molecular beam epitaxy. The MgO buffer is very effective on the improvement of surface morphology during the initial growth stage, which eventually leads to an atomically flat surface. As a result, (3×3) surface reconstruction of ZnO is observed and reflection high-energy electron diffraction intensity oscillations are recorded. Structural analysis indicates that the twin defect with a 30° in-plane crystal orientation misaligned is completely eliminated, while the total dislocation density is reduced. Free exciton emissions at 3.3774 eV (XA) and 3.383 eV (XB) are observed in photoluminescence at 4.2 K further indicating the high quality of the resulting ZnO epilayers.
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