Abstract
We demonstrate the capability of cluster secondary ion mass spectrometry on characterization of multi-layer ultrathin films assembled by electrostatic adsorption of oppositely charged polyelectrolytes. The samples consisting of layers of polyethylenimine, PEI, and polystyrene sulfonate, PSS, were bombarded with 19 keV (CsI)Cs + and 21 keV Au 3 + projectiles with secondary ions identified by time-of-flight mass spectrometry. The data show the high sensitivity of cluster SIMS to the physico-chemical characteristics of the two topmost layers.
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