Abstract
We clarified experimentally that layer thickness error significantly affects the laser-induced damage threshold (LIDT) of multilayer laser mirrors. The layer thickness error causes a shift of the maximum-reflectance wavelength (λc) of the mirror from the design wavelength (=laser wavelength λ0). The shift Δλ (=λc-λ0) dependence of the LIDTs of the dielectric multilayer mirrors for 1053, 527, and 355 nm lasers was measured. The LIDT decreased as the |Δλ| increased and was laser-wavelength dependent.
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