Abstract

X-ray diffraction measurements have been carried out on epitaxial superlattices (SLs) in symmetric Laue geometry. High quality pseudomorphic CdF2/CaF2 SLs on Si(111) have been used as samples. Satellites, due to periodic variations of structural factor value, are revealed at ω-scanning rocking curves. A comparison of information about SL provided by diffraction in Bragg and Laue geometries is presented. The possibility of direct determination of SL structural parameters is discussed.

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