Abstract
This work focuses on the study of the dynamic behavior and lattice size dependence of the surface root-mean-square slope in a porous thin film deposition process taking place on a triangular lattice. The simulation results indicate that the expected mean slope square reaches quickly a steady-state value and exhibits a very weak dependence with respect to lattice size variation. The simulation findings are corroborated by an analysis of appropriate finite-difference discretizations of surface height profiles computed by an Edwards-Wilkinson-type partial differential equation that can be used to describe the dynamics of surface height profile in the thin film deposition process under consideration.
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