Abstract
Successful growth of lattice-matched Sc1−xErxAs layers buried in GaAs with a room-temperature resistivity of ∼50 μΩ cm demonstrates the feasibility of fabricating heterostructures of lattice-matched rare-earth monopnictides and monochalcogenides in semiconductors. Reflection high-energy electron diffraction oscillations during ScAs, ErAs, and Sc1−xErxAs growth indicate monolayer-by-monolayer growth.
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