Lattice location and thermal stability of implanted Fe in ZnO

Abstract

The emission channeling technique was applied to evaluate the lattice location of implanted Fe59 in single-crystalline ZnO. The angular distribution of β− particles emitted by Fe59 was monitored with a position-sensitive electron detector, following 60 keV low dose (2.0×1013cm−2) room-temperature implantation of the precursor isotope Mn59. The emission patterns around the [0001], [1̱102],[1̱101], and [2̱113] directions revealed that following annealing at 800 °C, 95(8)% of the Fe atoms occupy ideal substitutional Zn sites with rms displacements of 0.06-0.09 Å.