Abstract
A novel actuator toward a low voltage actuation and fast response in RF-MEMS (radio frequency micro-electro-mechanical systems) switches is reported in this paper. The switch is comprised of laterally movable triple electrodes, which are bistable by electrostatic forces applied for not only the on-state, but also the off-state. The bistable triple electrodes enable the implementation of capacitive series and shunt type switches on a single switch, which leads to high isolation in spite of the small gap between the electrodes on the series switch. These features of the actuator are effective for a low voltage and fast response actuation in both the on- and off-state. The structure was designed in RF from a mechanical point of view. The laterally movable electrodes were achieved using a simple, low-cost two-mask process with 2.0 µm thick sputtered aluminum. The characteristics of switching response time and actuation voltage were 5.0 µs and 9.0 V, respectively.
Highlights
Radio frequency micro-electro-mechanical systems (RF-MEMS) switches have a high potential to evolve terminals for wireless communication and wireless sensor networks
Actuation forces used in the RF-MEMS switches are representatively electrostatic, piezoelectric, electromagnetic, and thermoelastic
The electrostatic actuator is the leading candidate because of its simple structure, CMOS compatible process, and high generated force. In spite of these advantages, the RF-MEMS switches using the electrostatic actuator have disadvantages of relatively slow switching speeds over 10 μs, high actuation voltages over 10 V, mechanical reliability, and larger footprint size than the semiconductor switches. They obstruct the RF-MEMS switches to be used in the wireless communication terminals
Summary
Radio frequency micro-electro-mechanical systems (RF-MEMS) switches have a high potential to evolve terminals for wireless communication and wireless sensor networks. Vertical comb-drive approach is reported to achieve to the lower spring constant is the cause of a slower response time into a separated state between the a fast pull-up response using structure with two metalRF-MEMS layers [14,15]. This has been aa simple critical problem in the past reported switches. Low-cost one metal layer process is effective for a low voltage actuation and fast response in Lateral comb-drive actuators integrated in circuit are reported, and actuation voltage is still over. Design and low-cost one metal layer process is effective for a low voltage actuation and fast response in RFMEMS switches
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
