Abstract

A novel structure of the resonant pressure sensor is presented in this paper, which tactfully employs intercoupling between dual pressure-sensing diaphragms and a laterally driven resonant strain gauge. After the resonant pressure sensor principle is introduced, the coupling mechanism of the diaphragms and resonator is analyzed and the frequency equation of the resonator based on the triangle geometry theory is developed for this new coupling structure. The finite element (FE) simulation results match the theoretical analysis over the full scale of the device. This pressure sensor was first fabricated by dry/wet etching and thermal silicon bonding, followed by vacuum-packaging using anodic bonding technology. The test maximum error of the fabricated sensor is 0.0310%F.S. (full scale) in the range of 30 to 190 kPa, its pressure sensitivity is negative and exceeding 8 Hz/kPa, and its Q-factor reaches 20,000 after wafer vacuum-packaging. A novel resonant pressure sensor with high accuracy is presented in this paper.

Highlights

  • The resonant pressure sensor, which is one of the typical microelectromechanical systems (MEMS)devices, has been successfully applied in aerospace, industry control, and instrument calibration due to its highly accurate frequency output

  • This article demonstrates the operation of a novel structure of a resonant pressure sensor with intercoupling between the dual pressure-sensing diaphragms and a laterally driven resonator with combined beams

  • The coupling mechanism around the diaphragms and the combined beams has been analyzed and the frequency equation of the resonator based on the triangle geometry theory was developed for this coupling structure

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Summary

Introduction

The resonant pressure sensor, which is one of the typical microelectromechanical systems (MEMS)devices, has been successfully applied in aerospace, industry control, and instrument calibration due to its highly accurate frequency output. The resonant pressure sensor, which is one of the typical microelectromechanical systems (MEMS). Depending on the coupling mechanisms between pressure and resonator, these pressure sensors can be classified into vibrating diaphragm structure and diaphragm/beam coupling structure. The coupling structure has a simpler structure function partition, which can be divided into two connected parts: the pressure-sensing element and the pressure transition element. A diaphragm, which has been widely used in capacitive and piezoresistive pressure sensors, is the most common sensing element. A resonator with a high quality factor (Q-factor) [7], whose resonant frequency is changed with the beam internal stress, is used as a pressure transition element

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