Abstract
We have demonstrated experimentally that an infrared visible sum frequency generation (SFG) confocal microscope with an objective lens of numerical aperture 0.45 has a lateral resolution of 0.48±0.06 µm. As samples for the demonstration, we used a ZnS(100) wafer with a structure fabricated by a focused ion beam method and a ZnS polycrystalline pellet. The result was consistent with the theoretical resolution of a confocal microscope.
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