Lateral base design rules for optimized low-frequency noise of differentially grown SiGe heterojunction bipolar transistors

Abstract

The low-frequency noise dependence on lateral design parameters was investigated for SiGe heterojunction bipolar transistors fabricated by differential epitaxy. The low-frequency noise was found to vary substantially as a function of the extrinsic base design. The dominant noise sources were located either at the interface between the polycrystalline and epitaxial Si/SiGe base, in the epitaxial Si/SiGe base link region, in the base–emitter depletion region, or at the thin SiO 2 interface layer between the polysilicon and monosilicon emitter. Boron was found to passivate interfacial traps, acting as low-frequency noise sources. Generation–recombination noise with a strong dependence on the lateral electrical field was observed for some of the designs.